| 摘要 |
PROBLEM TO BE SOLVED: To prevent deterioration in resolution of an unevenness image of a sample surface caused from temperature changes in a room. SOLUTION: A sample scanner 5 with a tube scanner 6 mounts a sample holder 7. The sample scanner 5 is mounted in a sample driving mechanism 3 via a sample stage 4. The stage driving mechanism 3 is supported by a base unit 1. A cantilever 12 mounted to an SPM head 10 right over a sample 8 attached to the sample holder 7 is arranged; a probe 14 attached to the distal end of the cantilever 12 is opposed to the probe 14; physical quantities acting between the probe 14 and the sample 8 is detected by relatively scanning the probe 14 and the sample 8; then, an unevenness image of the sample is obtained based on the physical quantities. The base unit 1 is supported by a chamber 21 made of a thermally insulating material so as to surround a bottom and sides thereof. COPYRIGHT: (C)2008,JPO&INPIT
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