发明名称 Semiconductor device and method for manufacturing the same
摘要 A semiconductor device which does not reduce writing property of a memory element and a method for manufacturing the same are proposed even in the case of forming a silicon film at a step portion formed by a surface of a substrate and a wiring formed over the substrate. The semiconductor device includes a plurality of the memory elements comprising a first electrode formed over a substrate having an insulating surface, sidewall insulating layer formed on side surface of the first electrode, a silicon film formed to cover the first electrode and the sidewall insulating layer, and a second electrode formed over the silicon film, and at least one of the first electrode and the second electrode is formed with a material being capable of being alloyed with the silicon film.
申请公布号 US2008116500(A1) 申请公布日期 2008.05.22
申请号 US20070979992 申请日期 2007.11.13
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 TOKUNAGA HAJIME
分类号 H01L29/76;H01L21/20 主分类号 H01L29/76
代理机构 代理人
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