| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for estimating hardness of a DLC film capable of being applied to the quality control or the like of the DLC film and estimating the hardness of the DLC film in a non-destructive manner, and to provide a method of estimating the hardness of the DLC film. SOLUTION: The device 1 for estimating the hardness of the DLC film includes a laser Raman spectrometer 2 for acquiring a width of a G band waveform of the DLC film by the laser Roman spectroscopic method, a database memory means 3 for storing a database wherein the width of a G band waveform and the hardness of the DLC film based on the laser Raman spectroscopic method of the DLC film are related with each other, and an estimation means 4 for estimating the hardness of the DLC film on the basis of the width of the G band waveform of the DLC film acquired by the laser Raman spectrometer 2 and the database. COPYRIGHT: (C)2008,JPO&INPIT
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