| 摘要 |
PROBLEM TO BE SOLVED: To provide a reflecting optical device that can be used without being corroded by hydrofluoric acid generated under the environment where a gas containing fluorine atoms in molecules. SOLUTION: A plurality of metal layers 12 and 13 consisting of gold being materials of a reflecting mirror are layered on a substrate 11, and an adhesive layer 14 consisting of chromium is arranged between each metal layer and between the lowest metal layer and the substrate 11. An outermost surface layer 13 among the metal layers takes action as the reflecting optical device. By this arrangement, the hydrofluoric acid is prevented from entering inside of the device from defects 151 and 152, which are formed in the metal layers 12 and 13, thereby preventing the peeling of the metal layers 12 and 13 caused by that the substrate 11 is corroded by the hydrofluoric acid. Further, the peeling of the metal layers 12 and 13 is completely prevented by covering the device with a protective film 21 having high durability against the hydrofluoric acid from the top thereof. COPYRIGHT: (C)2008,JPO&INPIT
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