MOLDING DIE FOR OPTICAL DEVICE WITH ANTIREFLECTIVE STRUCTURE, PROCESS FOR PRODUCING THE SAME, AND OPTICAL DEVICE

摘要

A process for producing through simple operations a molding die for optical device having an antireflective structure of nano-order microscopic uneven plane on a substratum surface. The molding die (1) for optical device having microscopic uneven plane (antireflective structure die plane) (1') on a surface of substratum (2) is produced by a process comprising forming one or more etching transfer layers (3) on substratum (2); forming thin film (4) for formation of semispherical microparticles on the etching transfer layers (3); causing the thin film (4) to undergo aggregation, or decomposition, or nucleation of the material by the use of any of thermal reaction, photoreaction and gas reaction or a combination of these reactions so as to form multiple semispherical islandlike microparticles (5); and using the multiple islandlike microparticles (5) as a protective mask, carrying out sequential etching of the etching transfer layers (3) and substratum (2) by reactive gas to thereby form a conical pattern on the microscopic surface of the substratum (2).