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发明名称
Dry Etching Apparatus
摘要
申请公布号
KR100831292(B1)
申请公布日期
2008.05.22
申请号
KR19990065976
申请日期
1999.12.30
申请人
发明人
分类号
H01L21/3065
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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