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经营范围
发明名称
METHOD FOR MAKING A THIN FILM LAYER
摘要
申请公布号
EP1922433(A2)
申请公布日期
2008.05.21
申请号
EP20060789179
申请日期
2006.08.02
申请人
3M INNOVATIVE PROPERTIES COMPANY
发明人
HAASE, MICHAEL A.;BAUDE, PAUL, F.;HEMMESCH, ERIC, W.
分类号
C23C14/04;C23C14/12;C23C14/24
主分类号
C23C14/04
代理机构
代理人
主权项
地址
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