INTERFACE CONTROL FOR FILM DEPOSITION BY GAS-CLUSTER ION-BEAM PROCESSING,申请号EP20010910460-传众专利搜索

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发明名称	INTERFACE CONTROL FOR FILM DEPOSITION BY GAS-CLUSTER ION-BEAM PROCESSING
摘要
申请公布号	EP1299903(A4)	申请公布日期	2008.05.21
申请号	EP20010910460	申请日期	2001.02.08
申请人	TEL EPION INC.	发明人	FENNER, DAVID B.
分类号	H01L21/314;C23C14/00;C23C14/02;H01L21/02;H01L21/28;H01L21/306;H01L21/311;H01L21/316;H01L21/318;H01L21/8242;H01L21/8246;H01L27/105;H01L27/108;H01L29/51	主分类号	H01L21/314
代理机构		代理人
主权项
地址

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