Integrated optical sensor, has waveguide with measurement, reference arms; reference arm is connected to arrangement(s) for phase shifting sub-wave carried by reference arm

摘要

The sensor has at least one waveguide for transferring electromagnetic waves with at least one measurement arm and reference arm carrying mutually coherent electromagnetic sub-waves. The measurement arm has at least one sensing region that causes a phase shift in its sub-wave under the influence of at least one physical or chemical measurement parameter. The reference arm is connected to at least one arrangement for phase shifting its sub-wave. The sensor has at least one waveguide (5) for transferring electromagnetic waves that forms at least one measurement arm (12) and reference arm (13) that carry mutually coherent electromagnetic sub-waves. The measurement arm has at least one sensing region (16) that causes a phase shift in the sub-wave carried by the measurement arm under the influence of at least one physical or chemical measurement parameter. The reference arm is connected to at least one arrangement for phase shifting the sub-wave carried by the reference arm. An Independent claim is also included for a use of the sensor, especially as a Mach-Zehnder interferometer with an integrated phase modulator.