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发明名称
清洁构件、具清洁功能之搬送构件及基板处理装置之清洁方法
摘要
本发明提供一种清洁构件,其可于清洁部位不产生污染而简便、确实、充分地除去细微异物,较佳的是可除去次微米级之异物。本发明并提供具有上述清洁构件之具清洁功能之搬送构件、以及使用有上述清洁构件或该具清洁功能之搬送构件之基板处理装置的清洁方法。本发明之清洁构件具有层状构件,该层状构件于表面具备复数个柱状构造之凸部,该柱状构造之凸部为碳系奈米构造体。
申请公布号
TW200821260
申请公布日期
2008.05.16
申请号
TW096125709
申请日期
2007.07.13
申请人
日东电工股份有限公司
发明人
寺田好夫;菅生悠树;吉田良德;前野洋平
分类号
B82B1/00(2006.01);H01L21/677(2006.01);H01L21/304(2006.01)
主分类号
B82B1/00(2006.01)
代理机构
代理人
陈长文
主权项
地址
日本
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