| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized gas sensor element with high selectivity for gases and high sensitivity that senses concentration of a gas in an object with gases, such as hydrogen and others, without the use of the presence of a specific gas such as oxygen, and a gas concentration measuring device using the same. SOLUTION: The gas sensor element and the gas concentration measuring device using the same are provided, in which a thin film 10 heat-separated from a substrate 1 is divided to two thin films with thermal resistance sections 45 so that they have thermal resistances respectively, with a heater and a temperature sensor 20a installed in one of the thin films and a gas absorber 5 and a temperature sensor 20b in the other, and changes in temperature resulting from heat absorption and generation in absorption and discharge of a gas to be sensed in the gas absorber 5 are measured by a temperature sensor 20b. COPYRIGHT: (C)2008,JPO&INPIT
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