摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator which can achieve improvement of breakdown voltage for electrostatic destruction. <P>SOLUTION: In a piezoelectric vibrating reed in which a plurality of vibrating arm units project from a base unit, and a piezoelectric vibrator in which exciting electrodes are formed ranging from main planes to side planes of the vibrating arm units, and lead out electrodes pulled out from the exciting electrodes are formed in the base unit, slot units are formed on a surface of the base unit, and the lead out electrodes are formed in the slot units. Moreover, a depth of the slot units is made to be more than thickness of the lead out electrodes formed in the slot units. Furthermore, an insulation film is formed on the front surface of the base unit so as to cover the lead out electrodes formed in the slot units. <P>COPYRIGHT: (C)2008,JPO&INPIT |