发明名称 MICRO-CAVITY MEMS DEVICE AND METHOD OF FABRICATING SAME
摘要 A MEM switch is described having a free moving element (140) within in micro-cavity (40), and guided by at least one inductive element. The switch consists of an upper inductive coil (170); an optional lower inductive coil (190), each having a metallic core (180, 200) preferably made of permalloy; a micro-cavity (40); and a free-moving switching element (140) preferably also made of magnetic material. Switching is achieved by passing a current through the upper coil, inducing a magnetic field in the coil element. The magnetic field attracts the free-moving magnetic element upwards, shorting two open wires (M_l, M_r) and thus, closing the switch. When the current flow stops or is reversed, the free-moving magnetic element drops back by gravity to the bottom of the micro-cavity and the wires open. When the chip is not mounted with the correct orientation, gravity cannot be used. In such an instance, a lower coil becomes necessary to pull the free-moving switching element back and holding it at its original position.
申请公布号 KR20080041676(A) 申请公布日期 2008.05.13
申请号 KR20087005252 申请日期 2006.08.30
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 HSU LOUIS C.;CLEVENGER LAWRENCE A.;DALTON TIMOTHY J.;RADENS CARL J.;WONG KEITH KWONG HON;YANG CHIH CHAO
分类号 H01P1/10 主分类号 H01P1/10
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