| 摘要 |
The present invention aims to provide a surface defect inspection apparatus and a surface defect inspection method for properly inspecting for a concave-shaped flaw (or a part thereof) substantially in parallel with a plane of incidence. The apparatus includes an illumination unit 10 illuminating a front surface (surface under inspection 5 a) of an object to be inspected 5 with illumination light for inspection, a changing unit 1, 33 which relatively rotating the object to be inspected and the illumination unit around an axis AX 1 perpendicular to the surface under inspection 5 a and changing illumination conditions of the illumination light, a light reception unit 20 receiving scattered light emitted from the surface under inspection when illuminated with illumination light in each illumination condition, to capture images thereof, and a combining unit 32 combining images captured by the light reception unit to generate a combined image.
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