发明名称 Semiconductor device with power supply impurity region
摘要 A semiconductor device in which by fixing a well at a predetermined potential via a contact within a memory cell, latch-up immunity is improved without accompanying increase in the area of the memory cell, and of which manufacture is facilitated, and a manufacturing method thereof. In a semiconductor device including MOS transistors each having an N-type impurity region 110 formed in a P-well 101 provided in a silicon substrate 100 thereof and including a GND contact 130 for supplying a GND potential to the P-well 101 , a portion of an impurity region 110 is etched and removed. Then, a P-type diffusion layer 131 for power supply is formed in the etched and removed region in the silicon substrate. Power supply to the P-well 101 is then performed via the GND contact 130 connected to the power supply diffusion layer 131.
申请公布号 US7372105(B2) 申请公布日期 2008.05.13
申请号 US20050139679 申请日期 2005.05.31
申请人 NEC ELECTRONICS CORPORATION 发明人 TOMIZAWA TOMOHIRO
分类号 H01L29/41;H01L29/94;H01L21/00;H01L21/8244;H01L27/10;H01L27/11;H01L29/76 主分类号 H01L29/41
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