| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-temperature heating furnace capable of uniformly heating a sample of a comparatively large area. SOLUTION: In this high-temperature heating furnace 1 having a main heating chamber 2 for heating the flat plate-shaped sample placed on a sample support 14 to an optimum treatment temperature, a W mesh heater 10 for heating the sample by radiating far infrared ray, and a reflecting body 11 for reflecting the infrared ray radiating from the W mesh heater 10 toward the sample support 14 are disposed in the main heating chamber 2, a reflecting face 11S of the reflecting body 11 is formed into the ellipsoid having a focal point S2 on a position of the sample support 14, and the W mesh heater 10 is cylindrically shaped to be used as a surface light source. COPYRIGHT: (C)2008,JPO&INPIT |
