发明名称 METHOD OF FORMING VIA
摘要 PROBLEM TO BE SOLVED: To provide a method of forming a via by a printing method preventing a pressure by contact of a printing plate from being applied to a material to be printed and easy to control a via diameter. SOLUTION: The method of forming the via includes a step of applying conductive ink on a desired position on a surface of a wiring pattern 12 provided on a substrate 11 by a non-contact printing method such as an ink jet or dispenser method, thereby forming the via 13 having a protrusion 13a around its periphery to obtain a cross section including the periphery protruding more than the center. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008108857(A) 申请公布日期 2008.05.08
申请号 JP20060289371 申请日期 2006.10.25
申请人 SONY CORP 发明人 NOMOTO AKIHIRO;YAGI ITSUKI
分类号 H01L21/768 主分类号 H01L21/768
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