发明名称 Threshold voltage targeting in carbon nanotube devices and structures formed thereby
摘要 Methods and associated structures of forming a microelectronic device are described. Those methods may include forming at least one metal source/drain on a gate dielectric, wherein the at least one metal source/drain is adjacent to a channel region, wherein the channel region comprises at least one carbon nanotube.
申请公布号 US2008108214(A1) 申请公布日期 2008.05.08
申请号 US20050299228 申请日期 2005.12.09
申请人 INTEL CORPORATION 发明人 MAJUMDAR AMLAN;CHAU ROBERT S.;BRASK JUSTIN K.;RADOSAVLJEVIC MARKO;METZ MATTHEW V.
分类号 H01L21/44 主分类号 H01L21/44
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