发明名称 |
SYSTEM AND METHOD FOR DETECTING NON-CATHODE ARCING IN A PLASMA GENERATION APPARATUS |
摘要 |
A system and method for detecting the potential of non-cathode arcing in a plasma generation apparatus, such as a physical vapor deposition chamber. The system and method involve computing a statistical parameter of cathode-arcing event data in the chamber and performing a pattern recognition technique to a moving average of the statistical parameter. |
申请公布号 |
WO2008034092(A3) |
申请公布日期 |
2008.05.08 |
申请号 |
WO2007US78548 |
申请日期 |
2007.09.14 |
申请人 |
SCHNEIDER AUTOMATION INC.;KRAUSS, ALAN F. |
发明人 |
KRAUSS, ALAN F. |
分类号 |
C23C16/54;G01R19/00;H01J37/32 |
主分类号 |
C23C16/54 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|