| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an extreme ultraviolet light source device, of which an exchange work of a discharge part, a convergent mirror or the like is easy, and a down time of a device can be shortened. <P>SOLUTION: A lid member 21 covering an opening of a vessel 10 in free attachment to and detachment from the vessel 10 is provided. A discharge member 18 composed of a first electrode 11, a second electrode 12, an insulating material 13, or the like, an EUV convergent mirror 2, and a foil trap 3 are fitted to the lid member 21 to make up a discharge part convergent mirror unit 19. Then, at the state of the discharge part convergent mirror unit 19, after a light axis of the discharge member 18 is made consistent with that of the convergent mirror 2, and a position of the convergent mirror 2 in the light axis direction is adjusted against the discharge member 18, a convergent mirror side of the discharge part convergent mirror unit 19 is directed toward the opening of the vessel 10 (a chamber), and the convergent mirror 2 and the foil trap 3 are inserted into the chamber 10 to fix the lid member 21 to the vessel 10. <P>COPYRIGHT: (C)2008,JPO&INPIT |
