| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact fluid control unit in which a staying portion is hardly produced in a passage. SOLUTION: The fluid control unit to output fluid by switching it comprises a manifold block 50 in which the passage is formed, a first valve 10 attached to a first side of the manifold block 50 to control a first fluid, a second valve 20 attached to a second side opposite to the first side of the manifold block 50 to control a fluid, and a third valve 30 attached to the second side of the manifold block 50 to control a second fluid. In the manifold block 50 are formed first passages 60, 61 to communicate with an opening of a first valve seat 62 and the opening of a second valve seat 65, a second passage 64 to output fluid branching from the first passages 60, 61, and third passages 66, 67 to communicate with and the opening of the third valve seat 68 the outside of the second valve seat 65. COPYRIGHT: (C)2008,JPO&INPIT
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