| 摘要 |
A charge eliminating device, a charge eliminating method, and a program storage medium are provided to block damages to a device by preventing an ESD from affecting the device. A mount of a DUT(Device Under Test) is relatively moved with respect to a probe card. The DUT on the mount is electrically contacted with the probe card. A charge eliminating device eliminates ESD(ElectroStatic Discharge) from the DUT. The charge eliminating device includes a ground line(22), a relay switch(23), and a switch controller(26). The ground line couples the mount to a ground potential. The relay switch is arranged on the ground line. The switch controller opens and closes the relay switch. The mount includes a top plate, on which the DUT is placed. The ground line is contacted with a first conductive film which is formed on the top plate. |
