Energy monitoring or control of individual vias formed during laser micromachining

摘要

A method and system increase the quality of results achieved by laser micromachining systems. Data (158,178) relating to parameters controlling laser micromachining process (152) are recorded during the micromachining process, identified by the feature associated with the parameters used to micromachine, and stored on the system. The stored data can be either retrieved during the micromachining process to enable real time control or retrieved after workpiece (174) processing to conduct statistical process control.