PLASMA DISPLAY PANEL MANUFACTURING METHOD AND MANUFACTURING DEVICE

摘要

Provided is a plasma display panel manufacturing method which simplifies a manufacturing step by lowering a film formation temperature so as to easily obtain an oriented MgO film as a protection layer. Moreover, the manufactured device has a simple structure so as to reduce the tact time. The method is used for manufacturing a plasma display including a front substrate having a scan electrode, a sustain electrode, a dielectric layer, and a protection layer; and a back substrate having an address electrode, a barrier rib, and a fluorescent body. The temperature of a front glass substrate before deposition by an electron beam deposition device is kept at a normal temperature (120 degrees C or below) and the MgO film formation speed of the electron beam deposition device is set not smaller than 8000Å m/min. By the film formation at the normal temperature, it was possible to obtain an MgO film equivalent to the film formation at a high temperature.