APPARATUS FOR REMOVING FOREIGN MATERIAL FROM SUBSTRATE AND METHOD FOR REMOVING FOREIGN MATERIAL FROM SUBSTRATE

摘要

An apparatus and a method for removing foreign materials from a substrate which eliminate a possibility of readhesion of the foreign materials adhered on the substrate by surely removing the foreign materials and are applicable even to large substrates. The foreign material removing apparatus is provided with electrostatic chucks (2, 3) which form a substrate attracting plane (4) for attracting the substrate (1); a resin sheet supplying means (9) for supplying the substrate attracting plane (4) with a resin sheet (5); a resin sheet recovering means (13) for recovering the supplied resin sheet (5), and a substrate transfer means for transferring the substrate (1). The substrate (1) supplied to the electrostatic chucks (2, 3) by the substrate transfer means is permitted to be attracted to the substrate attracting plane (4) through the resin sheet (5), and the foreign materials (22) adhered on a side of the substrate attracting plane (4) of the substrate (1) are transferred onto the resin sheet (5) and removed.