| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a part mounting apparatus and a part mounting method capable of accurately and efficiently mounting parts such as film electronic parts on a substrate such as a glass substrate. <P>SOLUTION: A measuring device 21 moves along the edge part of a glass substrate 31 and measures the distance between the measuring device 21 and the glass substrate 31 at a predetermined position on the way during movement. Here, the measurement result by the measuring device 21 is sent to a controller 22 and in the controller 22, the state of deformation of the glass substrate 31 is acquired based on the measurement result, and the suction force of a suction pad 12 of a substrate conveying unit 10 is controlled. By causing the suction force to act on the suction pad 12, the glass substrate 31 to be conveyed by the substrate conveying unit 10 receives, as a result, the downward suction force by the suction pad 12 and the upward reaction force of a prop 13, and the local warp of the glass substrate 31 is corrected and at the same time, the height of the glass substrate 31, the height of the upper end of the prop 13 being a standard of reference, is held evenly. <P>COPYRIGHT: (C)2007,JPO&INPIT |
