发明名称 MODULAR CARRIER FOR SEMICONDUCTOR WAFER DISKS AND SIMILAR INVENTORY
摘要 A MODULAR CARRIER SYSTEM USES A SHELL PORTION (30) TO HOUSE SEMICONDUCTOR WAFER DISKS OR SIMILAR INVENTORY. THE MODULAR CARRIER SYSTEM USES AN EXTERNAL FRAME (70, 170) WITH ACCESSORIES ATTACHED TO THE FRAME (70, 170) SO THAT MULTIPLE CONFIGURATIONS OF ACCESSORIES ARE POSSIBLE WITH EACH SHELL PORTION (30) AND THE ACCESSORIES CAN BE RECYCLED WHEN THE SHELL PORTION (30) IS DISPOSED.
申请公布号 MY135391(A) 申请公布日期 2008.04.30
申请号 MY2002PI03165 申请日期 2002.08.27
申请人 ENTEGRIS, INC. 发明人 JAMES NIGG;RALPH HENDERER
分类号 B65D85/86;H01L21/673 主分类号 B65D85/86
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