| 摘要 |
A DLC(diamond-like carbon)-coated vacuum gate valve is provided to use DLD coating with high hardness and high lubrication by forming a surface coating layer for DLC on a base body, a main body, an upper body and an open/shut plate and by forming an intermediate layer between the bodies and the surface coating layer. A base body(102) has a first cavity. A main body(104) has a second cavity corresponding to the first cavity of the base body, coupled to one surface of the base body. An upper body(106) has a third cavity corresponding to the second cavity of the main body, coupled to the other surface of the main body in a confronting position of the base body. An open/shut plate(108) opens/shuts the third cavity of the upper body, capable of vertically moving up and down in the second cavity of the base body. A coating surface layer is DLC-coated on the surface of the main body, the upper body and the open/shut plate. The coating surface layer is coated at a temperature of 100-200 °C. An intermediate layer can be interposed between the surface of the main body, the upper body and the open/shut plate and the coating surface layer.
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