| 摘要 |
A multi-stage transfer apparatus for transferring substrates one by one is provided to increase process efficiency by automating a process for selectively transferring one or plural substrates while moving back and forth a substrate boat loading the substrates one by one. A flat panel-type substrate boat(10) has a flat panel part(11) for handling loaded substrates(2) by a unit of piece; wing parts(13) both sides of which are bent upward from the flat panel part, protruded, and then bent outward again; a hanging projection protruded upward on the upside of the wing part; and a receiving groove recessed at the lower side of the wing part correspondently to the size of the hanging projection. Plural support bars(102) are vertically set up and aligned on a base(101) of the size of dividing four sides of the substrate boat stacking the substrates one by one during a transfer process. Support blocks(103) are supported to slide in a vertical direction about plural support bars. The support bar has a linear motor guide comprising an armature unit having a coil at the inside. The support block is a linear motor block having a permanent magnet formed inside to respond to an induction magnetic field of the armature unit. The support block is horizontally connected to the support block installed at the adjacent support bar by a connecting bar(110). Plural first hanging levers(111,115) are horizontally turned by a rotating unit and installed on the upside of the connecting bar to support or release both lower sides of the substrate boat.
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