发明名称 ETCHING LIQUID, ETCHING METHOD, AND METHOD FOR PRODUCING COUNTER SUBSTRATE FOR LIQUID CRYSTAL DISPLAY PANEL
摘要 <p><P>PROBLEM TO BE SOLVED: To provide an etching liquid and an etching method suitable for the wet etching of an aluminum-containing material, and to provide a method for producing a counter substrate or the like. <P>SOLUTION: The etching liquid for an aluminum-containing material is composed of a solution containing ammonium hydrogen fluoride, hydrogen peroxide and water. <P>COPYRIGHT: (C)2008,JPO&INPIT</p>
申请公布号 JP2008081832(A) 申请公布日期 2008.04.10
申请号 JP20060266618 申请日期 2006.09.29
申请人 HOYA CORP 发明人 SUGIHARA OSAMU;KANAZAWA KAZUFUMI
分类号 C23F1/20;G02F1/1368 主分类号 C23F1/20
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