发明名称 APPARATUS AND METHOD FOR TESTING SEMICONDUCTOR DEVICE
摘要 An apparatus and a method for testing a semiconductor device are provided to shorten a development period by facilitating a board design in a DUT parallel expansion process. A first board(100,200,300,400) includes a site and a first application. A DUT(Device Under Test) is loaded on the site. The first application is formed to test the DUT. A second board(600) collects test results through the first application, transmits the test results to a handler, and sorts the test results. An interface connector(700) is formed to connect the first board and the second board to each other electrically. The first board is attached to or detached from a fixing frame(500). The site is composed of a dual site on which two DUTs are loaded.
申请公布号 KR20080031575(A) 申请公布日期 2008.04.10
申请号 KR20060097606 申请日期 2006.10.04
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 YEANG, DONG SIN;LEE, SUNG WOO;KIM, JAE YOUNG;KIM, YOUNG CHEOL;HWANG, IN SUEL
分类号 G01R31/319;G01R31/26;G01R31/3187;H01L21/66 主分类号 G01R31/319
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