LASER PROCESSING DEVICE

摘要

A laser processing device capable of forming a modified region inside a workpiece in a reduced time. The device (100) has a placement table (107), a light source for emitting a linear polarized laser beam (L), a light source (41) for emitting a laser beam (L3), a wavelength plate (51) for changing the direction of polarization of the laser beam (L), a polarization plate (52) for branching the laser beam (L) into a laser beam (L1) polarized in the X-axis direction and a laser beam (L2) polarized in the Y-direction, a waveguide plate (55) for polarizing the branched laser beam (L2) to the X-direction, a lens (31) for converging the laser beams(L1, L3), a lens (32) for converging the laser beam (L2) and placed in the X-axis direction next to the lens (31) such that the X-direction is the polarizing direction of the lens (32), a control section (105) for detecting the laser beam (L4) to thereby control an element (29) so that the converging point of the laser beam (L2) is aligned with a predetermined position with reference to a surface (3), and a control section (115) for causing the X-direction to substantially meet with a line (5) and moving the placement table (107) along the line (5).