| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample preparation apparatus that can extract only the sample piece which includes a desired specific region from a semiconductor wafer and a device chip, can transfer and fix the piece, and in particular, is suitable for automation by facilitating probe tip positioning at micromanipulation. SOLUTION: The sample preparation apparatus uses an ion beam process, a technology for carrying the sample piece, and further a technology for fixing the sample piece to a sample piece holder. Identification of the position of the probe tip is easily identified, by synchronizing the incoming current of a carrying probe, with ion beam scanning and turning into data. COPYRIGHT: (C)2008,JPO&INPIT
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