| 摘要 |
A complex stage is provided to allow one to four tables to move individually and precisely in an X-axis or a Y-axis in a narrow space. A first conveyance device(10) driven in an X-axis includes a first ball screw(14). The second ball screw driven by using a first reversible motor(13) is installed in a first main frame(12). The first ball screw includes first and second pinion gears(11) facing to each other. The pinion gears have a driving table(15) screwed with the ball screw and a driven table subject to a slide operation. The driving table is paired with the driven table. A second conveyance device(20) driven in a Y-axis includes a second main frame(21). The lower portion of the second main frame is fixed to the driving table and the driven table. The second main frame includes a second ball screw(23) driven by a second reversible motor(22).
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