LIQUID MATERIAL VAPORIZER

摘要

A vaporizer which prevents deterioration of raw material while reducing residue, can expect reduction in risk of choking, and can increase vaporization flow rate easily. The liquid material vaporizer comprises an introduction port (P1) for introducing material in liquid phase or gas-liquid mixture phase, a vaporizing section (3) for vaporizing the material provided on the downstream side of the introduction port (P1), and a delivery port (P2) for delivering the material vaporized at the vaporizing section (3), wherein the vaporizing section (3) is of a channel type and consists of a nozzle (31) for spraying the material and a heating path (32) provided on the downstream side of the nozzle (31) continuously thereto. A plurality of vaporizing sections (3) are provided in parallel between the introduction port (P1) and the delivery port (P2), and arranged such that each vaporizing section (3) can distribute the material independently of each other.