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发明名称
Fokussierlinse für Strahlen geladener Teilchen
摘要
申请公布号
DE602004012056(D1)
申请公布日期
2008.04.10
申请号
DE200460012056T
申请日期
2004.01.21
申请人
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUER HALBLEITERPRUEFTECHNIK MBH
发明人
FEUERBAUM, HANS-PETER
分类号
H01J37/28;H01J37/12
主分类号
H01J37/28
代理机构
代理人
主权项
地址
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