发明名称 |
HIGH PRECISION CODE PLATES AND GEOPHONES |
摘要 |
An apparatus and method are disclosed for imaging a diffraction grating with a very high depth of focus, using a highly accurate code plate position measurement system. Positions may be measured to an accuracy of 1 nm or even smaller. The system may be used in fields such as manufacturing integrated circuits, and low- and very-low-frequency geophones, and other low- and very-low-frequency acoustic detectors.
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申请公布号 |
WO2007075675(A3) |
申请公布日期 |
2008.04.10 |
申请号 |
WO2006US48414 |
申请日期 |
2006.12.20 |
申请人 |
BOARD OF SUPERVISORS OF LOUISIANA STATE UNIVERSITY AND AGRICULTURAL AND MECHANICAL COLLEGE;FELDMAN, MARTIN;JIANG, LI |
发明人 |
FELDMAN, MARTIN;JIANG, LI |
分类号 |
G01B11/14 |
主分类号 |
G01B11/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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