| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an inspection device that enables effective utilization of a test body, and to provide a method therefor. <P>SOLUTION: The inspection device that acquires test body information by using electromagnetic waves has a transmission line 12, a unit 11 for generating electromagnetic waves, a unit 14 for detecting electromagnetic waves, and a wall structure 13. The transmission line 12 is formed on a substrate 10 and makes electromagnetic waves propagate. The unit 11 for generating electromagnetic waves generates electromagnetic waves and supplies them to the transmission line 12. The unit 14 for detecting electromagnetic waves detects the electromagnetic waves that have propagated through the transmission line 12. The wall structure has a sidewall portion that extends along the transmission line 12, in a region in which the electromagnetic waves propagate through the transmission line 12, and that rises from the surface of the substrate 10 directed toward the inside of the region. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
