Pressure sensor having two materials with different coefficients of thermal expansion configured to reduce temperature dependence

摘要

An interferometer pressure sensor includes a reflective film configured to change a position thereof responsive to a pressure change and an interferometer element configured to detect the position change of the reflective film. A holder is configured to hold the reflective film and the interferometer element. The holder includes a first member formed of a first material having a first coefficient of thermal expansion and a second member formed of a second material having a second coefficient of thermal expansion that is different from the first coefficient of thermal expansion. The first member and the second member of the holder are sized and configured based on the first coefficient of thermal expansion and the second coefficient of thermal expansion so that a distance between the reflective film and the interferometer element is substantially constant over a temperature range.