| 摘要 |
A substrate treating apparatus is provided to measure the state of the treating solution projected from a slit nozzle in a compression sensor, thereby improving the accurate of coating treatment. An air discharge pipe(42) is installed at the secondary side of a slit nozzle(41). The pipe and a pipe(63) installed at the primary side of the slit nozzle are communicated directly and the pipe is communicated with an oil path(410) within the slit nozzle directly. A compression sensor(413) is installed at the pipe and the measured value is transmitted to a control member. The resist solution is supplied to the slit nozzle from a pump(61) and at this time, the compression within the pipe is measured by the compression sensor. The slit nozzle includes the first body member(41a) and the second body member(41b). A predetermined concave portion is installed at the contact surface of the first body member. The contact surfaces of the first and second body member are united with each other, the concave portion of the first body member acts as the oil path of the resist solution. |
