| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscopic apparatus for matching a plurality of irradiation locations of a plurality of pulse lights in response to an irregularity in the surface of an analyzed object. SOLUTION: An analyzer is provided with: light sources 21, 23, 41 for generating a plurality of the beams of pulse laser light P12, P14' including different wavelength components; an optical system 35 for irradiating the analyzed object 60 with the beams of pulse laser light P12, P14'; a first detecting section 62 for detecting first light P15 emitted from the analyzed object 60 by irradiating a plurality of the pulse laser lights P12, P14'; a second detecting section 61 for detecting second light P16 emitted from the analyzed object 60 by irradiating a plurality of the beams of pulse laser light P12, P14'; and adjusting sections 65, 31 for matching the irradiation locations of a plurality of the beams of pulse laser light P12, P14' based on an intensity of the second light P16 detected by the second detecting section 61. COPYRIGHT: (C)2008,JPO&INPIT
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