GATE VALVE

摘要

A gate valve is provided to regulate loading and unloading of a substrate. The gate valve comprises: a bracket, which surrounds a gate installed in a vacuum chamber, and includes guide rails installed vertically on opposite sides of the gate; a pressing member, which includes a fixing plate moving up and down along the guide rails, a least one shaft pin interconnecting the fixing plate and a sealing plate, and a tube installed between the shaft pins inside the fixing plate and forcing the sealing plate to regulate the gate using expansion force; a cylinder, which is installed on one side of the bracket, and raises and lowers the pressing member; and a guide member, which interconnects opposite ends of the pressing member, and enables the opposite ends of the pressing member to perform synchronous operation when the pressing member is raised and lowered by the cylinder.