| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a vacuum valve capable of enlarging size of a valve opening while being simple in construction. <P>SOLUTION: A first longitudinal drive (21) and a second longitudinal drive (22) are provided with a plurality of actuating elements (25), (26) which include activation ends (29), (30) located in vacuum region of a valve housing (1). The actuating elements (25), (26) are guided into the vacuum region through vacuum guides (27), (28) and are capable of displacing between non-operating position and operating position by driving elements (23), (24) which are disposed outside the vacuum region. The activation ends (29), (30) are separated from an opening/closing rim (13) when the actuating elements (25), (26) are in non-operating position. On the other hand, the activation ends (29), (30) are pressed against the opening/closing rim (13) and a first opening/closing plate (14) is pressed against a first valve seat (11) or a second opening/closing plate (15) is pressed against a second valve seat (12) when the actuating elements (25), (26) are in operating position. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
