| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an actuator device of good piezoelectric characteristics, along with a manufacturing method thereof and a liquid jetting head. <P>SOLUTION: The manufacturing method includes a process in which a base material layer is formed on a substrate, a process in which a lower electrode 60 is formed on the base material layer, a process in which a piezoelectric body precursor film 71 is formed on the lower electrode and is crystallized to form a first piezoelectric body film 72, a process in which the lower electrode 60 and the first piezoelectric body film 72 are patterned in specified form, a process for implanting a seed substance ion 61, which is a nucleus of crystal of the piezoelectric body layer 70, in at least a region where the piezoelectric body layer 70 is provided, on the outside of the end part of the lower electrode 60 of the base material layer, a process in which a piezoelectric body precursor film is formed in the region of the base material layer and the first piezoelectric body film 72 where the seed substance ion 61 is implanted and then is crystallized to form a second piezoelectric body film 73 to form the piezoelectric body layer 70 consisting of the first piezoelectric body film 72 and the second piezoelectric body film 73, and a process for forming an upper electrode on the piezoelectric body layer 70. <P>COPYRIGHT: (C)2008,JPO&INPIT |
