发明名称 Surface acoustic wave element, method of manufacturing the same and surface acoustic wave device
摘要 A surface acoustic wave element is provided including an IDT and reflectors provided on both sides of the IDT that are on a surface of a quartz plate. The quartz plate is made from an in-plane rotated ST cut quartz plate whose cutting angle is expressed as (0°, 113°-135°, ±(40°-49°)) by defining and using Euler angle. The IDT and reflectors are arranged at a slant of PFA±3° with respect to a direction of a phase velocity of a surface acoustic wave in the quartz plate. If the cutting angle of the quartz plate is expressed by the Euler angle (phi°, theta°, Psi°), the power flow angle PFA is expressed that the PFA=0.374 (theta°-90°)-10.0°.
申请公布号 US7352104(B2) 申请公布日期 2008.04.01
申请号 US20040010014 申请日期 2004.12.10
申请人 SEIKO EPSON CORPORATION 发明人 YAMAZAKI TAKASHI;IIZAWA KEIGO
分类号 H01L41/08;H03H9/25;H03H3/08;H03H9/02;H03H9/145 主分类号 H01L41/08
代理机构 代理人
主权项
地址