发明名称 Method for controlling the position of a movable object, a positioning system, and a lithographic apparatus
摘要 A method of actuating a movable object in a first degree of freedom includes a) providing a first motor assembly including one or more motors of a first type and a second motor assembly including one or more motors of a second type, each of the first and second motor assembles being configured to move the movable object in the first degree of freedom, b) feeding the first motor assembly with a feed-forward signal of a feed-forward unit on the basis of a feed-forward reference signal, and c) feeding the second motor assembly with a control signal of a position control unit on the basis of a position control reference signal.
申请公布号 US7352149(B2) 申请公布日期 2008.04.01
申请号 US20060511492 申请日期 2006.08.29
申请人 ASML NETHERLANDS B.V. 发明人 BUTLER HANS;KLAASSEN FRANCISCUS ADRIANUS GERARDUS
分类号 B64C17/08 主分类号 B64C17/08
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