| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for measuring a shape of an object by reproducing phase information in the measurement region of the measurement object. SOLUTION: The method and device measures the shape of the object by obtaining a plurality of diffraction images different in diffraction conditions necessary for reproducing phase information, and analyzing these diffraction images. The method and device includes: a monochromatic light irradiation step of irradiating with a plurality of waves different in the wave length; a diffraction image taking step of taking diffraction image of the object at the time of irradiated with each monochromatic light; and an analysis step of analyzing the plurality of diffraction images taken by the diffraction images taking process analyzed by the phase reproducing method. COPYRIGHT: (C)2008,JPO&INPIT
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