Substance detecting device for e.g. gas and liquid, has sensor layer for sorption of substance, and piezo ceramic layer arranged between electrode layers, where intermediate layer is arranged between sensor layer and one of electrode layers

摘要

The device (1) has a thin film resonator (10) with an acoustic resonator impedance, where the resonator unit has electrode layers (11, 12). A piezo ceramic layer (13) is arranged between the electrode layers. A sensor layer (14) is provided for sorption of a substance. An intermediate layer (15) with an acoustic intermediate layer- impedance is arranged between the sensor layer and one of the electrode layers and exhibits a polymer. The intermediate layer impedance is smaller than the resonator impedance. The intermediate layer exhibits carbon nano-tubes. An independent claim is also included for a method for detection of a substance of a fluid.