| 摘要 |
Inside the upper housing 12 along the X direction of an upper corner part in the upper housing 12 of the measurement apparatus 10 , a radiator 60 is provided. In the radiator 60 , metal thin plates are stacked to form flow paths, and temperature control water is caused to flow in the flow paths to perform heat exchange between the temperature control wafer and air in the upper housing 12 . On the opposite side of the radiator 60 to the upper housing 12 , the radiator blowing fan 62 is provided. The air heat-exchanged by the radiator 60 is sent by the radiator blowing fan 62 inside the upper housing 12 in the Y direction. The measurement apparatus 10 may comprise a cold insulation unit 80 . The cold insulation unit 80 includes a cold insulation vessel 82 , a blowing fan 90 , a radiator 92 , and a heat-radiation fan 94.
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