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发明名称
GASANGETRIEBENER DREHBARER SUSZEPTOR FÜR SCHNELLES WÄRMEBEHANDLUNGSSYSTEM
摘要
申请公布号
DE69938147(D1)
申请公布日期
2008.03.27
申请号
DE19996038147
申请日期
1999.12.03
申请人
STEAG RTP SYSTEMS GMBH
发明人
ASCHNER, HELMUT;HAUKE, ANDREAS;WEBER, KARSTEN;ZERNICKEL, DIETER
分类号
H01L21/00;H01L21/683;C23C16/44;C30B25/12;C30B31/14;H01L21/26;H01L21/31
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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